Desk Top Mask Aligner
MEMA-800
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Feature * Economical, Compact & Hi-Level Performance Application * Acuator, Pressure Sensor, Acceleration Sensor, Power Device, etc.
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Specification
| Alignment Scope | |
| Objectives separation | 15 ~ 75mm |
| Total magnification | 100X |
| Illuminator for observation | Red LED (λ=633 nm) |
| X, Y Movement range of stage | ±5 mm |
| θ Adjustment | ±5° |
| Utility | |
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Power source for main body and mercury lamp |
AC 100V 50/60Hz 15A |
| Vacuum source | Below 21.3 Kpa (-80 Kpa from atmospheric pressure) |
| Exposure Unit | |
| Lens | Integrator lens |
| Mercury lamp | 250W ultra-high pressure vapor mercury lamp |
| Effective exposure area | Max φ100 mm |
| Intensity distribution | ±5% or less |
| Intensity of illumination | 20 mW/cm2 (405 nm) |
| Exposure time control | Digital timer and rotary solenoid |
| Mercury Lamp Lighting Unit |
AC 110V |


