Duoble View Mask Aligner
MPEM-1600 |
MPEM-12M |
MPEM-16M |
|
(applicable to wafers up to 4 inches in diameter) |
(applicable to wafers up to 6 inches in diameter) |
(applicable to wafers up to 8 inches in diameter) |
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The MPEM series is a high precision double-view mask aligner including alignment optical systems on the top and bottom sides of a wafer, so that contact, soft-contact, and proximity patterning can be performed to the top side surface, in alignment with the pattern on the bottom side of the wafer. The accurate alignment of the mask and wafer was made possibly by the high- resolution optical system with the symmetrically arranged 10X objective lenses installed on the top and bottom sides. As the separation between the paired objective lenses can be adjusted, irregularly formed wafers can also be aligned freely.
* Besides the above, Motorized type MPEM-2000/4000 and Full Auto type MPEM-8M/12M are available.
Specification
| MPEM-1600 | MPEM-12M | MPEM-16M | ||
| Photomask size | 5-inches maximum | 7-inches maximum | 9-inches maximum | |
| Wafer size | up to 4-inches (Amorphous) | up to 6-inches (Amorphous) | up to 8-inches (Amorphous) | |
| Mask holder sliding | Manual chuck | |||
| Mask movement | X=±3 mm, Y=±3 mm | |||
| Exposure | Method | Soft contact / Hard contact / Proximity exposures | ||
| Illumination | 250W ultra-high-pressure vapor mercury lamp | 500W ultra-high-pressure vapor mercury lamp | ||
| Illumination irregularity | ±5% | |||
| Effective exposure area | Ø 100 mm in diamete | Ø 150 mm in diamete | Ø 200 mm in diamete | |
| Resolution | 3mµ L/S | |||
| Alignment | Method | Viewing by eyepieces (Sprit field system) | 9-inch TV monitor system | |
| Objective lenses | 10X two pairs (upper/lower) | |||
| Eyepieces | NWF 10X (one pair) | - | ||
| Total magnification | 100X | 200X | ||
| Objective lens separation | 15 ~ 90 mm | 80 ~ 140 mm | 55 ~ 184 mm | |
| Focusing units | Manual | |||
| Alignment range |
X, Y = ±4mm θ = ±22.5° |
X, Y = ±4mm θ = ±5° |
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| Alignment gap | 09 ~ 99µm | |||
| Alignment accuracy | less than ±5mm | |||
| Utilities | Power supply for main unit | 100-220V AC, 50/60Hz, 15A (600W) | ||
| Power supply for mercury lamp | 100-220V AC, 50/60Hz, 15A (550W) | 100-220V AC, 50/60Hz, 15A (1,100W) | ||
| N2 gas | 0.4 ~ 0.5 Mpa | 100-220V AC, 50/60Hz, 15A (1,100W) | ||
| Vacuum pressure |
less than 21.3kPa (-80kPa from atmospheric pressure) |
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| Dimensions (main unit) |
750(W)x 820(D)x 1,700(H)mm |
940(W)x 860(D)x 1,670(H)mm |
1,200(W)x 1,090(D)x 1,800(H)mm |
|
| Net weight | approx. 450 kg | approx. 550 kg | approx. 700 kg | |
| Options |
NWF 15X eyepieces (one pair) 9-inch TV monitor system (black and white) |
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