Double View Aligner

Duoble View Mask Aligner

MPEM-1600

MPEM-12M

MPEM-16M

(applicable to wafers
up to 4 inches in diameter)
(applicable to wafers
up to 6 inches in diameter)
(applicable to wafers
up to 8 inches in diameter)
Double View Mask Aligner PEM-800 Double View Mask Aligner PEM-6M Double View Mask Aligner PEM-8M

The MPEM series is a high precision double-view mask aligner including alignment optical systems on the top and bottom sides of a wafer, so that contact, soft-contact, and proximity patterning can be performed to the top side surface, in alignment with the pattern on the bottom side of the wafer. The accurate alignment of the mask and wafer was made possibly by the high- resolution optical system with the symmetrically arranged 10X objective lenses installed on the top and bottom sides. As the separation between the paired objective lenses can be adjusted, irregularly formed wafers can also be aligned freely.

* Besides the above, Motorized type MPEM-2000/4000 and Full Auto type MPEM-8M/12M are available.

Specification


  MPEM-1600 MPEM-12M MPEM-16M
Photomask size 5-inches maximum 7-inches maximum 9-inches maximum
Wafer size up to 4-inches (Amorphous) up to 6-inches (Amorphous) up to 8-inches (Amorphous)
Mask holder sliding Manual chuck
Mask movement X=±3 mm, Y=±3 mm
Exposure Method Soft contact / Hard contact / Proximity exposures    
Illumination 250W ultra-high-pressure vapor mercury lamp 500W ultra-high-pressure vapor mercury lamp
Illumination irregularity ±5%
Effective exposure area Ø 100 mm in diamete Ø 150 mm in diamete Ø 200 mm in diamete
Resolution 3mµ L/S
Alignment Method Viewing by eyepieces (Sprit field system) 9-inch TV monitor system
Objective lenses 10X two pairs (upper/lower)
Eyepieces NWF 10X (one pair) -
Total magnification 100X 200X
Objective lens separation 15 ~ 90 mm 80 ~ 140 mm 55 ~ 184 mm
Focusing units Manual
Alignment range X, Y = ±4mm
θ = ±22.5°
X, Y = ±4mm
θ = ±5°
Alignment gap 09 ~ 99µm
Alignment accuracy less than ±5mm
Utilities Power supply for main unit 100-220V AC, 50/60Hz, 15A (600W)
Power supply for mercury lamp 100-220V AC, 50/60Hz, 15A (550W) 100-220V AC, 50/60Hz, 15A (1,100W)
N2 gas 0.4 ~ 0.5 Mpa 100-220V AC, 50/60Hz, 15A (1,100W)
Vacuum pressure less than 21.3kPa
(-80kPa from atmospheric pressure)
Dimensions (main unit) 750(W)x
820(D)x
1,700(H)mm
940(W)x
860(D)x
1,670(H)mm
1,200(W)x
1,090(D)x
1,800(H)mm
Net weight approx. 450 kg approx. 550 kg approx. 700 kg
Options NWF 15X eyepieces (one pair)
9-inch TV monitor system (black and white)
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